Kuotisi Wafer Cleaning Boat
Ọkọ oju omi fifọ quartz wafer jẹ ẹrọ ti a lo fun mimọ wafer ninu ilana iṣelọpọ semikondokito.
Ohun elo: 99.99% kuotisi
Apejuwe
Awọn ẹya ara ẹrọ
- Idaabobo otutu giga
- Idaabobo ipata
- Wọ resistance
- Rọrun lati nu
Lo: yọ awọn contaminants dada kuro
Ṣe idaniloju didara iṣelọpọ ti awọn eerun semikondokito.
Ohun elo
1. Iṣaaju - Itankale Mimọ
Ti a lo lati gbe awọn wafer nipasẹ ibujoko tutu tabi awọn igbesẹ mimọ immersion (fun apẹẹrẹ, mimọ RCA) lati yọ Organic, ti fadaka, ati awọn contaminants kuro ṣaaju ki o to ga- itọka iwọn otutu tabi awọn ilana oxidation.
2. Ifiweranṣẹ-CMP (Eto Iṣeto Imọ-iṣe Kemikali) Mimọ
Di awọn wafers mu lakoko ifiweranṣẹ{0} didan mimọ lati yọkuro awọn iṣẹku slurry ati awọn abawọn oju, ni idaniloju iyẹfun ti o dara julọ fun awọn igbesẹ lithography atẹle.
3. Iwaju-Ipari-ti{3}}Laini (FEOL) Ṣiṣẹda
Ti a gbaṣẹ ni awọn ipele mimọ FEOL to ṣe pataki nibiti ultra- awọn ipele mimọ ti nilo fun idagbasoke oxide ẹnu-ọna, ifisilẹ epitaxial, tabi gbin ion.
4. Pada-Ipari-ti{3}}Laini (BEOL) Ṣiṣẹ
Ṣe atilẹyin awọn wafers lakoko ifiweranṣẹ{0}}etch tabi firanṣẹ{1}} mimọ ibi ipamọ lati yọ photoresist kuro, awọn ọja-ọja etch, ati awọn idoti onirin lẹhin idasile isopọpọ.
5. Apoti ilọsiwaju
Ṣe irọrun wafer{0}}iwọn mimọ ṣaaju dicing tabi isọpọ ni apoti 2.5D/3D IC, ni idaniloju idoti{3}}awọn atọkun ọfẹ fun awọn isopọ to gbẹkẹle.
6. Iṣẹ iṣelọpọ Fọtovoltaic
Ti a lo ninu iṣelọpọ sẹẹli oorun lati nu awọn sobusitireti ohun alumọni, imudara didara dada fun imudara ina imudara ati ṣiṣe iyipada agbara.
Awọn ohun-ini
|
Ti ara Properties |
Awọn iye |
|
Mimo |
＞99.99% |
|
iwuwo |
2.2g/cm3 |
|
Itumọ |
＞90% |
|
Mohs Lile |
5.5--6.5 |
|
Point abuku |
1280 iwọn |
|
Ojuami Rirọ |
1750 iwọn |
|
Annealing Point |
1250 iwọn |
|
Ooru kan pato ({0}} ìyí) |
670J/kg. ìyí |
|
Imudara Ooru (iwọn 20) |
1.4W/m. ìyí |
|
Iṣiṣẹ Ooru (w/mk, iwọn 1000) |
1.0-1.2 |
|
Atọka Refractive |
1.4585 |
|
olùsọdipúpọ ti Gbona Imugboroosi |
5.510 -7cm/cm. ìyí |
|
Gbona - Ooru sise |
1750--2050 iwọn |
|
Ooru iṣẹ igba kukuru - |
1450 iwọn |
|
Ooru Iṣẹ pipẹ - gigun |
1100 iwọn |
|
Kemikali Properties |
Awọn iye |
|
Acid sooro |
Acid to lagbara (ayafi HF), alkali ti o lagbara, ojutu Organic |
|
Awọn iwọn otutu to gaju Ibajẹ sooro |
O tayọ |
|
Irin Aimọ Akoonu |
5ppm |
|
Itanna Properties |
Awọn iye |
|
Resistivity |
7107Ω.cm |
|
Agbara idabobo |
250 ~ 400Kv / cm |
|
Dielectric Constant |
3.7~3.9 |
|
Dielectric Absorption olùsọdipúpọ |
＜410-4 |
|
Dielectric Los olùsọdipúpọ |
＜110-4 |
|
Darí Properties |
Awọn iye |
|
Agbara titẹ |
1100MPa |
|
Titẹ Agbara |
67MPa |
|
Agbara fifẹ |
48MPa |
|
Iye owo ti Poisson |
0.14~0.17 |
|
Modulu odo |
72000MPa |
|
Modulu rirẹ |
31000MPa |
Awọn ọna mimọ
Ninu immersion:
Fi wafer sinu ọkọ oju-omi mimọ, lẹhinna fi omi mimọ sinu omi mimọ, ki o pọ si olubasọrọ laarin omi mimọ ati dada wafer nipa gbigbe ọkọ oju omi wafer lati mu ipa mimọ dara sii.
Sokiri ninu:
Duro ọkọ oju-omi mimọ ni pipe ni iyẹwu fun sokiri, ki o lo nozzle lati fun omi mimọ naa si oju wafer lati yọ awọn idoti kuro. o
Pataki ti awọn ọkọ oju omi mimọ:
- Rii daju mimọ wafer: Ilẹ wafer mimọ jẹ pataki si didara iṣelọpọ ti awọn eerun semikondokito, ati pe ọkọ oju omi mimọ ṣe ipa pataki ninu ilana mimọ.
- Rii daju igbẹkẹle ti awọn eerun semikondokito: Rii daju igbẹkẹle awọn eerun igi ati dinku awọn abawọn ọja nipa yiyọ awọn idoti oju ilẹ.
- Ṣe ilọsiwaju ikore ti awọn eerun semikondokito: Ṣe ilọsiwaju mimọ ti awọn wafers, nitorinaa imudara ikore ti awọn eerun semikondokito.
Awọn afiwe Gbona: kuotisi wafer ti npa ọkọ oju omi, China quartz wafer ninu awọn olupilẹṣẹ ọkọ oju omi, awọn olupese, ile-iṣẹ
Fi ibere ranṣẹ
O le Tun Fẹran
